First publication out on PP-ASP ALD tool 😀. This work shows great opportunities for ALD of NbTiN and in turn NbN and TiN for superconducting quantum technology. Great example of the strong collaboration between Oxford Instruments, @tue.nl, and @uofglasgow.bsky.social #ALDep doi.org/10.1116/5.02...
09.04.2025 09:52 — 👍 5 🔁 0 💬 0 📌 0